miBot is the smallest nano-resolution manipulator on the market. The use of piezoelectric actuators in revolutionary mobile motion technology makes miBot extremely accurate and very easy to control. Various micro-tools can be installed on the miBot tool holder, which makes it particularly suitable for research and development applications in materials science, microelectronics and photonics, whenever in-situ physical interaction with samples is required.
Specification
Resolution: < 10 nm Full Travel: Several centimeters Max. Speed: 2 mm/sec
Features
Extremely compact design High mechanical and thermal stability Short leverage reduces sensitivity to vibrations Monolithic design enhances robustness Ultra high resolutions of positioning in large travel range Piezoelectric actuators work in step and scan mode Almost no motion limitation High operating speed No backlash High degree of modularity and versatility Compatible with SEM / FIB microscopes Optical (light) microscopes compatible A variety of plugin micro-tools for use in many applications Unprecedented ease-of-use No mounting screws Manual pre-positioning Rapid setting-up and reconfiguration Easy transfer between microscopes Rapid micro-tool exchange Intuitive control via control pad and software interface No coupling movements Extremely short training time