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Elemental Analysis by Total Reflection X-Ray Fluorescence (TXRF) (CAT#: STEM-EA-0210-ZJF)

Introduction

We provide surface metallic contaminant detection as well as the trace and ultra-trace elemental surface analysis of thin sample layers based on Total Reflection X-Ray Fluorescence (TXRF). TXRF is capable of detecting elements from Na to U with the detection limits from 10^9 to 10^12 at/cm2. TXRF utilizes total reflection of incident primary X-Rays, to enhance the intensity of Secondary (Fluorescent) X-rays emitted from a thin sample, placed on a polished carrier. It utilizes extremely low-angle X-ray excitation of a polished wafer surface to obtain the concentration of surface metallic contaminants.
TXRF is a highly surface-sensitive technique and has been applied to a wide variety of industries. If you have any requirements or questions. Don't hesitate to contact us.




Principle

Total Reflection X-ray Fluorescence (TXRF) utilizes total reflection of a known wavelength of primary X-Rays, to reduce background scatter and noise in the secondary emission (Fluorescence) from a targeted sample surface. Through this technique, the intensity of the Secondary X-Ray spectrum emitted by analyte atoms on the surface of a thin sample (100 microns) is increased. The sample is deposited as a thin layer on a polished sample carrier in this technique. The incident primary X-ray beam impinges on the sample carrier at an angle below the critical angle for X-ray total reflection. Critical angles are determined by the polished carrier material and the wavelength of the incident X-ray. Typical critical angles range from 0.040 for Plexiglass at 35keV to 0.550 for Gold at 8.4 keV. The atoms in the sample, when excited by impinging primary X-rays, emit secondary X-rays (fluorescence), which are counted and measured by a solid-state detector. The detector is placed directly above the sample at a distance of about 0.5 mm to 1 mm, to capture maximum fluorescence radiation from the sample. The measured signal is analyzed by energy intensity, providing an energy dispersive spectrum. The fluorescence signal emitted from the sample is characteristic of the elemental contaminants present.

Applications

Semiconductors, chemical, biotechnology, metallurgy, environmental, medicine, geology, forensics, etc.

Procedure

1. Sample preparation
2. Sample analysis by TXRF
3. Data output

Materials

• TXRF system
• Sample material: thin films, finely powdered solids, suspension depositions, dried liquids, polymers.
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