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We provide surface metallic contaminant detection as well as the trace and ultra-trace elemental surface analysis of thin sample layers based on Total Reflection X-Ray Fluorescence (TXRF). TXRF is capable of detecting elements from Na to U with the detection limits from 10^9 to 10^12 at/cm2. TXRF utilizes total reflection of incident primary X-Rays, to enhance the intensity of Secondary (Fluorescent) X-rays emitted from a thin sample, placed on a polished carrier. It utilizes extremely low-angle X-ray excitation of a polished wafer surface to obtain the concentration of surface metallic contaminants.
TXRF is a highly surface-sensitive technique and has been applied to a wide variety of industries. If you have any requirements or questions. Don't hesitate to contact us.