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FRG-700/702 Pirani Inverted Magnetron Gauge (CAT#: AM-LE-0450-Y)

Highlights

• The two measurement technologies are integrated in a compact, integrated and economical package
• Measurement process and ultimate pressure from 5 x 10-9 mbar to atmospheric pressure (38 x 10-9 Torr to atmospheric pressure)
• The filament is not easily destroyed

Cat Number: AM-LE-0450-Y

Model: FRG702KF25

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Description

FRG-700/702 Pirani Inverted Magnetron Gauge is manufactured by Agilent Technologies. Agilent FRG-700 is a full-range gauge, and FRG-702 is a full-metal model of FRG-700. Two measuring technologies are integrated in a compact and economical regulation to measure the working pressure and ultimate pressure from 5 x 10 -9 mbar to atmospheric pressure (3.8 x 10 -9 Torr to atmospheric pressure).

Specification

Measuring range: 5 x 10-9 to 1000 mbar (3.8 x 10-9 to 760 Torr)
Accuracy: ± 30% of reading, typical value
Repeatability: ± 5% of reading, typical value
Maximum cable length: ≤ 50 m
Working voltage/current: ≤ 3.3 kV/≤ 500 A
Materials exposed to vacuum: SS, Al2O3, FPM75, Mo, Ni, Au, W
Internal volume: ≈ 20 cm3
Weight: DN 25 ISO-KF ≈ 700 g, DN 40 CF ≈ 980 g
Standards: EN 61000-6-2, EN 61000-6-3, EN 61010-1
Minimum load impedance: 10 kΩ, short circuit protection
Response time: <10 ms (when the pressure is greater than 10-6 mbar), ≈ 1000 ms (when the pressure is equal to 10-8 mbar)
Identification regulation: 85 kΩ, refer to common supply

Features

• The two measurement technologies are integrated in a compact, integrated and economical package
• Measurement process and ultimate pressure from 5 x 10-9 mbar to atmospheric pressure (38 x 10-9 Torr to atmospheric pressure)
• The filament is not easily destroyed
• Easy to clean
• Integrated, compact regulation with logarithmic analog output, which can greatly reduce the complexity of installation, setup and integration
• Excellent starting performance
• Suitable for monitoring high vacuum pressure, the ultimate pressure of evaporation and sputtering systems, and general vacuum measurement and control in the middle and high vacuum range

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