Test Structures TGXYZ01 (20 nm Step Height XYZ Calibration Grating), MikroMasch (CAT#: STEM-M-0146-LKN)

MikroMasch Test Structures TGXYZ are calibration gratings, intended for vertical and lateral calibration of SPM scanners. One can compensate for vertical non-linearity by using several calibration gratings with different nominal step heights. TGXYZ Calibration are arrays of different structures comprising rectangular SiO2 steps on a Si wafer. The small square in the center with dimensions 500 µm by 500 µm includes circular pillars and holes, as well as lines in the X- and Y- direction with a pitch of 5 µm. The large square with dimensions 1mm by 1mm contains square pillars and holes with a pitch of 10 µm. The step height value is calibrated over the whole active area. The actual step height, indicated on the individual unit label, may differ slightly from the nominal value.

Step height: 20 nm, 2% Accuracy
Pitch: 5 & 10 µm, 0.1 µm Accuracy
Active area: 1 mm x 1 mm
Chip dimensions: 5 mm x 5 mm x 0.3 mm

Test Structures TGXYZ01/NM (20 nm Step Height XYZ Calibration Grating), MikroMasch (CAT#: STEM-M-0147-LKN)
Test Structures TGXYZ02 (100 nm Step Height XYZ Calibration Grating), MikroMasch (CAT#: STEM-M-0148-LKN)