The VHS-10 Diffusion Pump is manufactured by Agilent Technologies. The VHS series pumps are available in 4 inch, 6 inch, 250 mm, 10 inch and 400 mm sizes, and are the fastest and cleanest products in the same size diffusion pumps today.
Specification
Pumping rate, working range Pumping rate, AVS4.1 (1963): 3650 L/s air, 4560 L/s helium/hydrogen 5300 L/s air Maximum pumping capacity: 6.3 T L/s (8.4 mbar L/s) in the working range, 7.5 T L/s (45 mbar L/s) at 0.01 torr Operating range: At 4400 W, the pressure is 1.7 x 10^-3 to below 5 x 10^-9 torr (2.3 x 10^-3 to below 6.5 x 10^-9 mbar) Maximum pre-stage pressure: no load: 0.65 torr (0.85 mbar) full load: 0.55 torr (0.72 mbar) Oil return rate, standard cooling cap less than 5.0 x 10^-4 mg/cm2/min Warm-up time: 15 minutes Cooling time: 25 minutes Oil injection volume: 1000 cc Electrical requirements: 3-phase, 50/60 Hz, 208/240/380/480 VAC Pump power: 4400 W Cooling water requirement: 0.40 gpm (80 L/hr) Connection water cooling: 1/8 inch FPT tee
Features
• Maximum pumping speed can be achieved • Stainless steel pump body • Pump oil injection and drain assembly • 5100 watt high airborne type is available • High level of withstand voltage • Overheating protection • Fractionating nozzles can purify fluids • The oil level sight glass can quickly indicate the condition of the pump oil at any time
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