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2830 ZT WDXRF Wafer Analyzer, Malvern Panalytical (CAT#: STEM-LE-0312-LC)

Cat Number: STEM-LE-0312-LC

Application: Wavelength Dispersive X-ray Fluorescence

Model: 2830 ZT

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Description

2830 ZT WDXRF Wafer Analyzer is a wavelength-dispersive X-ray fluorescence (WDXRF) that measures film thickness and layer composition, dopant content, and surface uniformity of wafers under 300 mm. The 4 kW SST-mAX X-ray tube uses game-changing ZETA technology to eliminate the influence of aging of the X-ray tube and maintain the performance of the "new tube" throughout the life of the tube.

Specification

Detector(s): Hi-Per Scint Detector, Duplex Detector
Principle: Wavelength Dispersive X-ray Fluorescence
X-Ray Tube: 4 kW SST-mAX X-ray Tube (Super Sharp X-ray Tube)
Sample Type: Wafers
Analysis Diameter: up to 300 mm
Element Range: B to U

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