2830 ZT WDXRF Wafer Analyzer is a wavelength-dispersive X-ray fluorescence (WDXRF) that measures film thickness and layer composition, dopant content, and surface uniformity of wafers under 300 mm. The 4 kW SST-mAX X-ray tube uses game-changing ZETA technology to eliminate the influence of aging of the X-ray tube and maintain the performance of the "new tube" throughout the life of the tube.
Specification
Detector(s): Hi-Per Scint Detector, Duplex Detector Principle: Wavelength Dispersive X-ray Fluorescence X-Ray Tube: 4 kW SST-mAX X-ray Tube (Super Sharp X-ray Tube) Sample Type: Wafers Analysis Diameter: up to 300 mm Element Range: B to U