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As the "heart" of microfluidic system, microfluidic pump is the power source of microfluidic transport and an important symbol of the development level of microfluidic system. As an important micro actuator, microfluidic pump is widely used in drug delivery, blood transport, DNA synthesis, electronic cooling system, micro total analysis system, micro fuel cell, micro satellite propulsion system and other fields, and has a huge market application prospect. Microfluidic pump is small, easy to integrate, easy to manufacture and environmentally friendly.