Dynamic Secondary Ion Mass Spectrometry (D-SIMS) Technology

Dynamic secondary ion mass spectrometry (D-SIMS) technology is a very sensitive surface analysis technology that uses primary ions to excite a sample surface and produce extremely small amounts of secondary ions. Then, the type of element is determined according to the mass of the secondary ion. D-SIMS can provide elemental structure information on surfaces, films, interfaces, and even 3D samples. The technology has the characteristics of small analysis area, shallow analysis depth and high detection limit. D-SIMS is commonly used for surface analysis of metals, glass, ceramics, films and other materials.