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Elemental Analysis by Scanning Electron Microscopy-Energy Dispersive Spectroscopy (SEM-EDS) (CAT#: STEM-EA-0212-ZJF)

Introduction

Using SEM-EDS, we determine the elemental composition of surfaces as small as nanometers in diameter. Additionally, SEM-EDS is capable of analyzing multiple spots to create elemental maps of a sample's surface, revealing whether materials are present as broad phases or as small localized impurities. EDS, also known as energy-dispersive x-ray spectroscopy, energy dispersive x-ray analysis, or energy dispersive x-ray microanalysis, is an analytical method used to determine the chemical and elemental composition of a sample. In order to gain a full understanding of the sample, energy-dispersive spectroscopy is often used in conjunction with scanning electron microscopy. Using SEM-EDS, all elements from B to U are detectable, with detection limits of 1000 - 3000 ppm and depth resolutions of 0.5 to 3 um.
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Principle

In order to gain a complete understanding of the sample, energy-dispersive spectroscopy is frequently used in conjunction with scanning electron microscopy. A scanning electron beam is emitted by the electron microscope, which excites the atoms of the sample and produces a spectrum of electromagnetic emissions. Each element emits a distinctive emission spectrum due to its unique atomic structure. The emission spectrum is analyzed by our technicians in order to identify the sample.

Applications

Identification of surface elemental composition
Thin films analysis
Examination of surface morphology
Particle contamination identification
Identification of trace impurity spots

Procedure

1. Sample preparation
2. Sample analysis by SEM-EDS
3. Data output

Materials

• SEM-EDX system
• Sample material: unidentified particles, polymer filler material, contaminants and inclusions, wear metals, platings and coatings, corrosion products, alloys
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