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Using SEM-EDS, we determine the elemental composition of surfaces as small as nanometers in diameter. Additionally, SEM-EDS is capable of analyzing multiple spots to create elemental maps of a sample's surface, revealing whether materials are present as broad phases or as small localized impurities. EDS, also known as energy-dispersive x-ray spectroscopy, energy dispersive x-ray analysis, or energy dispersive x-ray microanalysis, is an analytical method used to determine the chemical and elemental composition of a sample. In order to gain a full understanding of the sample, energy-dispersive spectroscopy is often used in conjunction with scanning electron microscopy. Using SEM-EDS, all elements from B to U are detectable, with detection limits of 1000 - 3000 ppm and depth resolutions of 0.5 to 3 um.
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