Ellipsometer, 190-2100 nm (CAT#: STEM-S-0012-YJL)

Ellipsometer, 190-2100 nm, model UVISEL2 is manufactured by HORIBA. UVISEL2 is a completely innovative fully automatic spectroscopic ellipsometer. It inherits and develops the technical characteristics of high accuracy, high sensitivity and high stability of the classic model UVISEL, and is equipped with an innovative visual system, with up to 8 micro-spot options, the smallest is 35×85μm2.

Spectral range: 190-2100 nm
8 spot sizes: minimum 35 × 85 um
•Detectors: 3 independent detectors, respectively optimized for UV, visible and NIR
•Automatic sample stage size: 200mm X 200mm; XYZ direction automatic adjustment; Z-axis height>35mm
Automatic adjustment of sample level
•Automatic protractor: variable angle range 35°-90°, fully automatic adjustment, minimum step size 0.01°

Fully automatic design, auto focus correction
New circuit, circuit design, higher measurement accuracy and faster speed
50KHz high-frequency PEM phase modulation technology, no moving parts in the measurement optical path
Dual grating spectrometer system with high level of stray light suppression
8 sizes of micro-spots, patented visual technology
Automatic platform sample scanning imaging