The HS-16 Diffusion Pump is manufactured by Agilent Technologies, the HS series pumps are available in 2-inch and 16-inch to 35-inch sizes and feature high speed, low ultimate pressure, high pumping capacity, high front endurance, and low oil return.
Specification
Pumping rate, working range: 6000 L/s air, 7500 L/s helium and hydrogen Pumping rate*, AVS 4.1 (1963): 10000 L/s air Working range: At 9600 W, the pressure is 2 x 10-3 to less than 5 x 10-8 Torr Maximum pre-stage withstand voltage: no load — 0.65 Torr, full load — 0.55 Torr Pump power: 8100/9600 W Oil return rate**, standard cooling cap: less than 1.5 x 10-3 mg/cm2/min Warm-up time: 30 minutes Cooling time: 48 minutes (only 30 minutes using the optional quick cooling coil) Oil injection volume: 2.8 L Electrical requirements: 3-phase, 50/60 Hz, 240/415/480 VAC Cooling water requirement: at 60-80 °F (15-26 °C), the pumping speed is 1.5 gpm Connection water cooling: 1/4 inch FPT tee
Features
• Five-stage fractionation nozzle can purify pump oil • 9600 watt high conductivity type available • High level withstand voltage • Overheating protection • Pump oil injection and discharge assembly • Optional quick cooling coil • Liquid level sight glass can quickly indicate the status of pump oil at any time • Provide a standard gauge port (NW-25) below the inlet flange • Foreline baffle prevents pump oil from entering the foreline pump system and causing loss • Optional halo baffle water-cooled cap can reduce oil return without increasing height