• Five-stage fractionation nozzle purifies the pump oil and ensures a better ultimate vacuum • High level of withstand voltage • Overheating protection
The HS-20 Diffusion Pump is manufactured by Agilent Technologies, the HS series pumps are available in 2-inch and 16-inch to 35-inch sizes and feature high speed, low ultimate pressure, high pumping capacity, high front endurance, and low oil return.
Specification
Pumping rate, operating range: 10000 L/s air, 12500 L/s helium and H2 Pumping rate, AVS4.1 (1963): 17500 L/s air Maximum pumping volume: 12.5 T L/s in the working range, 18 T L/s at 0.01 Torr Operating range: 1.3 x 10-3 to 5 x 10-8 torr Maximum pre-stage pressure: no load: 0.65 torr (0.85 mbar) Full load: 0.55 torr (0.72 mbar) Oil return rate, standard cooling cap: less than 1.5 x 10-3 mg/cm2/min Warm-up time: 45 minutes Cooldown: 85 minutes Oil injection volume: 4.7 L Electrical requirements: 3-phase, 50/60 Hz, 240/415/480 VAC Pump power: 12000 W Cooling water requirement: at 60-62.22°C (15-26°C), the pumping speed is 1.5 gpm (300 L/h) Connection water cooling: 1/4 inch FPT tee Recommended pump oil: DC-704
Features
• Five-stage fractionation nozzle purifies the pump oil and ensures a better ultimate vacuum • High level of withstand voltage • Overheating protection • The liquid level sight glass can quickly indicate the condition of the pump oil at any time • Pump oil injection and discharge assembly • Provide a standard gauge port (NW-25) under the inlet flange • Foreline baffle prevents pump oil from entering the foreline pump system and causing loss • Optional halo baffle water-cooled cap can reduce backflow without increasing height
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