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microCMA Compact Auger Analyzer, RBD Instruments (CAT#: STEM-LE-1037-LC)

Highlights

Installed on a 2.75 inch (70 mm) flange.
CMA's second-order focusing provides excellent transmission and resolution.
With the help of USB interface, the use of control and data massage software interface is as simple as RGA.

Cat Number: STEM-LE-1037-LC

Application: Thin film composition, Passive oxide thicknesses in semiconductors and metals, Metal component thermal oxides, Integrated circuit contamination, Characterization of sputtered layers, Auger depth profiles of deposited layers, Quantization of light element surface films

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Description Specification Features Related Products

Description

The Compact and affordable microCMA is a non-scanning (imaging) cylindrical mirror analyzer designed for AES applications where scanning (imaging) functionality is not required.

Specification

Type:Single Pass CMA (Cylindrical Mirror Analyzer)
Signal-to-Noise Ratio:100:1 on clean silver with 300 nA beam current
Mount:70 mm (2.75") OD. Needs 1.52" ID tube
Control:USB protocol, software controlled

Features

Installed on a 2.75 inch (70 mm) flange.
CMA's second-order focusing provides excellent transmission and resolution.
With the help of USB interface, the use of control and data massage software interface is as simple as RGA.
Auger electron spectroscopy is a powerful surface-sensitive technique that provides quantitative information about the first few monolayers of the sample.
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