Qulee CGM Series Compact Process Gas Monitor, ULVAC Technologies, Inc. (CAT#: STEM-LE-1900-LC)

Qulee CGM Series Basic Process Gas Monitor is designed for residual gas analysis and gas monitoring during processes.

Regulatory Status:CE

Ideal for process monitoring of a variety of sputtering system
No need for differential pumping system (at 1Pa (7.5×10-3 Torr, 1×10-2 mbar) or lower)
No need for PC
"One Click" function
Max 120°C (248°F) high temperature bake (250°C (482°F) when sensors are removed
Electron bombard degas
Ion source and secondary electron multiplier protection maintenance help function.
Traceability of analysis tube (patent pending)
Helium leak test, air leak test, built-up test
Able to measure total pressure (ionization gauge)
Included software with compatibility with (Windows XP/7)
Auto measuring package (refer to options catalog for details)
Conforms with CE

Qulee BGM Series Basic Process Gas Monitor