The SmartLab High-Resolution Diffraction System represents the latest technology in the fully automated modular XRD system. The system integrates a high-resolution theta/theta closed-loop goniometer drive system, CBO, in-plane scattering arm, optional 9.0 kW rotating anode generator, and a fully automated optical system, enabling experts and novice users to perform advanced measurement systems .
Closed-loop drive system for high-resolution scanning Optional 9.0 kW rotating anode generator Fully automatic system adjustment Automatic measurement based on guidance software 300mm wafer processing CBO is used for focusing and parallel beam geometry without reconfiguration In-plane diffraction arm allows in-plane measurements without reconfiguration High-resolution optics SAXS function
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