• Can reach the highest pumping speed at the same height • The liquid level sight glass can quickly indicate the condition of the pump oil at any time • Pump oil injection and discharge assembly
The VHS-400 Diffusion Pump is manufactured by Agilent Technologies. VHS series pumps are available in various sizes of 4 inches, 6 inches, 250 mm, 10 inches, and 400 mm, and are the fastest and cleanest products in the same size diffusion pumps today.
Specification
Pumping rate, working range Pumping rate, AVS4.1 (1963): 4500 air, 5625 L/s helium/hydrogen, 8000 L/s air Maximum pumping volume: 6.3 T L/s within the working range, 7.5 T L/s at 0.01 torr Operating range: 1.4 x 10^-3 to less than 5 x 10^-9 torr Maximum pre-stage pressure: no load: 0.65 torr (0.85 mbar) full load: 0.55 torr (0.72 mbar) Oil return rate, standard cooling cap: less than 1.0 x 10^-3 mg/cm2/min Warm-up time: 15 minutes Cooling time: 25 minutes Oil injection volume: 1000 cc Electrical requirements: 3 phase, 50/60 Hz, 208/380/480 VAC Pump power: 4400 W Cooling water requirement: 0.40 gpm (80 L/hr) Connection water cooling: 1/8 inch FPT tee
Features
• Can reach the highest pumping speed at the same height • The liquid level sight glass can quickly indicate the condition of the pump oil at any time • Pump oil injection and discharge assembly • 5100 watt high airborne type is available • Four-stage fractionation nozzle can purify pump oil • High level of withstand voltage • Overheating protection • Finned heating plate design increases surface area and extends pump oil life • Quick cooling coils are standard parts • The front stage baffle prevents pump oil from entering the front stage system and causing loss
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