The VHS-6 Diffusion Pump is manufactured by Agilent Technologies. The VHS series pumps are available in 4 inch, 6 inch, 250 mm, 10 inch and 400 mm sizes, and are the fastest and cleanest products in the same size diffusion pumps today.
Specification
Pumping rate, working range Pumping rate, AVS4.1 (1963): 1550 L/s air, 1930 L/s helium and hydrogen 2400 L/s air Maximum pumping capacity: 2.4 T L/s (3.2 mbar L/s) in the working range, 3.5 T L/s (4.5 mbar L/s) at 0.01 Torr Operating range: 1.5 x 10^-3 to less than 5 x 10^-9 torr (2 x 10^-3 to less than 6.5 x 10^-9 mbar) Maximum pre-stage pressure: no load: 0.65 torr (0.85 mbar) full load: 0.55 torr (0.72 mbar) Oil return rate, standard cooling cap: less than 5 x 10^-4 mg/cm2/min Warm-up time: 10 min Cooling time: 10 minutes (using quick cooling coil) Oil injection volume: 500 cc — accurate pump oil packaging available Electrical requirements: single phase, 50/60 Hz, 120/208/240 VAC Pump power: 2200 W Cooling water requirements: at 60-80 ℉ (15-26 °C), the pumping speed is 0.25 gpm (50 L/h) Water cooling connection: 1/8 inch FPT tee
Features
• Maximum pumping speed can be achieved • Overheating protection • Pump oil injection and drain assembly • High level of withstand voltage • Fractionating nozzles can purify pump oil • Finned heating plate design increases surface area and extends pump oil life • The oil level observation window can quickly indicate the condition of the pump fluid at any time
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