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VHS-6 Diffusion Pump (CAT#: AM-LE-0623-Y)

Highlights

• Maximum pumping speed can be achieved
• Overheating protection
• Pump oil injection and drain assembly

Cat Number: AM-LE-0623-Y

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Description

The VHS-6 Diffusion Pump is manufactured by Agilent Technologies. The VHS series pumps are available in 4 inch, 6 inch, 250 mm, 10 inch and 400 mm sizes, and are the fastest and cleanest products in the same size diffusion pumps today.

Specification

Pumping rate, working range Pumping rate, AVS4.1 (1963): 1550 L/s air, 1930 L/s helium and hydrogen 2400 L/s air
Maximum pumping capacity: 2.4 T L/s (3.2 mbar L/s) in the working range, 3.5 T L/s (4.5 mbar L/s) at 0.01 Torr
Operating range: 1.5 x 10^-3 to less than 5 x 10^-9 torr (2 x 10^-3 to less than 6.5 x 10^-9 mbar)
Maximum pre-stage pressure: no load: 0.65 torr (0.85 mbar) full load: 0.55 torr (0.72 mbar)
Oil return rate, standard cooling cap: less than 5 x 10^-4 mg/cm2/min
Warm-up time: 10 min
Cooling time: 10 minutes (using quick cooling coil)
Oil injection volume: 500 cc — accurate pump oil packaging available
Electrical requirements: single phase, 50/60 Hz, 120/208/240 VAC
Pump power: 2200 W
Cooling water requirements: at 60-80 ℉ (15-26 °C), the pumping speed is 0.25 gpm (50 L/h)
Water cooling connection: 1/8 inch FPT tee

Features

• Maximum pumping speed can be achieved
• Overheating protection
• Pump oil injection and drain assembly
• High level of withstand voltage
• Fractionating nozzles can purify pump oil
• Finned heating plate design increases surface area and extends pump oil life
• The oil level observation window can quickly indicate the condition of the pump fluid at any time

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