The AxTRAN Extremely High Vacuum Gauge is a hot cathode type ionization gauge. A Bessel box energy filter is installed between the ion source and the ion collector. This design provides a measurement resolution of 5x10E-11 Pa by reducing the residual current caused by soft X-rays and electron excited desorption (ESD) ions.
Features
Measurement range from ultra high vacuum to extremely high vacuum. Bessel box energy filter Measured value output signal Control output signal Digital output and serial communication