Europlasma CD600 Nanofics S/SE Nano Coating System, Europlasma (CAT#: STEM-CA-1178-LGZ)

The manufacturer of Europlasma CD600 Nanofics S/SE Nano Coating System is Europlasma. Model is CD600. 17" touch screen. LED backlight. Integrated SSD hard drive.

Condition: used
Process chamber

Material: aluminium
Inside dimensions: 900 x 570 x 550 mm
Volume: 282 liter
Tray: 3, with dimensions 765 x 512 mm or custom design
Vacuum measurement: Baratron gauge

Generator: Custom design for Nanofics application

Pumping system: Dry pump group

PLC

The equipment and automatic processing is fully controlled by an industrial PLC.

The HMI (user interface) runs over an industrial touch panel PC having following properties:

17” touch screen.
LED backlight.
Integrated SSD hard drive.
The HMI offers following functionalities:

Process & Instrumentation Diagram showing real-time machine status.
User-level based log on for managing user rights from operator to engineer mode.
Recipe management system offering unlimited number of recipes, each recipe representing a unique set of process parameters.
Diagnostic functions.
Alarm management.
Optional historical data logging and viewing.
Electricity: 380V AC, 50Hz, 40A

Process gas

2 gas lines with MFC (Mass Flow Controller) for S coating
3 gas lines with MFC (Mass Flow Controller) for SE coating
Safety features: Emergency-off-switch, vacuum interlock, over temperature interlock, CE-label

Process gas connection: ¼’’-Swagelok-fitting, input pressure 1 Bar

1. Touch screen 17".
2. LED backlight.
3. Integrated SSD hard disk.

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