Test Structures TGX (Grating with Undercut-Edge Structures), MikroMasch (CAT#: STEM-M-0152-LKN)

MikroMasch Test Structures TGX are silicon calibration gratings, intended for lateral calibration of SPM scanners. They can also be used for detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects, as well as for determination of the tip aspect ratio. The TGX silicon calibration grating is an array of square holes with sharp undercut edges formed by anisotropic etching along the (111) crystallographic planes of silicon. The typical radius of the edges is less than 5 nm.

Step height: 1 µm
Pitch: 3 µm, 0.1 µm Accuracy
Edge radii: < 5 nm
Active area: 1 mm x 1 mm
Chip dimensions: 5 mm x 5 mm x 0.3 mm

Test Structures TGX/NM (Grating with Undercut-Edge Structures), MikroMasch (CAT#: STEM-M-0153-LKN)
Test Structures TGF11 (Grating with Trapezoidal Structures), MikroMasch (CAT#: STEM-M-0154-LKN)