Turbo-V 3K-G Turbomolecular Pump (CAT#: AM-LE-0784-Y)

The Turbo-V 3K-G Turbomolecular Pump is manufactured by Agilent Technologies, it is a special molecular pump system specially designed for plasma sputtering process. The vane series and the overall structure of the pump allow it to work in a high-purity argon atmosphere and in extremely high-temperature environments.

Pumping speed:
N2: 2200 L/s
He: 1900 L/s
Ar: 2050 L/s
Compression ratio:
N2:> 1 × 10^7
He: 6 × 10^3
Ar: 1 × 10^8
Ultimate vacuum* (use recommended foreline pump): <1 × 10^-8 mbar
Inlet flange: ISO 250F
Front pipe flange: KF 40 NW
Rated speed: 31800 rpm
Fore pressure: <0.5 mbar
Cooling requirement: water

• MTTF exceeds 200,000 hours
• The highest pumping speed of similar products
• Oil-free, durable and reliable
• Patented rotor shaft matching technology can greatly reduce rotor tensile stress
• Top rotor design significantly reduces weight and mechanical stress
• The only truly "integrated" system on the market

VHS-4 Diffusion Pump from Agilent Technologies
VHS-6 Diffusion Pump from Agilent Technologies