X'Pert3 MRD Materials Research X-ray Diffraction System, Malvern Panalytical (CAT#: STEM-LE-0295-LC)

The X'Pert3 Materials Research Diffractometer (MRD) is ideal for detailed structural analysis of advanced semiconductors, thin films, and nanomaterials. It provides various X-ray scattering methods, including high-resolution diffraction, in-plane diffraction, reflectivity, thin-film phase analysis, wafer mapping, GISAXS, stress, texture, as well as non-environmental analysis. X'Pert3 MRD has the highest resolution goniometer with HEIDENHAIN encoder to realize rapid positioning, and a 5-axis bracket to support and draw wafers up to 6 inches in diameter, as well as various advanced optical elements and detecors, such as PIXcel3D for fast mutual space mapping.

Detector(s): PIXcel3D 3D Detection System, X'Celerator, Xenon Proportional Detector
X-Ray Tube: Empyrean X-ray tube, choice of anodes: Cu, Co, Cr, Mo, Ag
Sample Type: Thin films, Solid objects
Goniometer Type: High resolution, with Heidenhain encoders

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